Optical coating machine maintenance

Optical coating machine is mainly composed of a vacuum coating machine room, vacuum pump group limited and cabinet (electric control cabinet, the armature consisting of electron gun), which are widely used in microelectronics, optical film, a civil decoration, surface engineering and other fields.

Optical coating device with excellent performance in the oil pollution prevention and shorten work period etc..

The working principle of optical coating device is in the high vacuum condition, using electron beam to the appropriate temperature of metal or nonmetal material heating, thermal evaporated into steam molecule. The mean free path than the evaporation source to substrate distance by evaporation, vapor molecules evaporation from direct to everywhere, met the substrate will deposited on the substrate surface to form wax layer.

The main replacement and maintenance of electron gun for installation and maintenance, repair and maintenance of the optical path, equipment cleaning and maintenance of optical coating machine maintenance.

一、The electron gun installation and maintenance

The electron gun evaporation source control system is composed of electron gun filament power supply, high voltage power supply, power supply, power supply, scanning a crucible driving evaporation source composed of a gun control of armature.

The electron gun control of armature contains high, before work to ensure the normal operation of each cabinet door interlocking device, non professionals can not open the door of the armature, the electron gun can not open the electric doors in the work, the entire cabinet must have good grounding and grounding connection with the machine.

The electron gun evaporation source is installed in the vacuum chamber bottom plate, must have a good grounding effect and the bottom plate, the installation of the evaporation source must use stainless steel screws, peripheral within 200mm there shall be no magnetic objects, otherwise it will affect the electron gun spot into the table, causing the electronic properties of bad. The electron gun baffle should try to install 30mm in the evaporation source crucible center, in order not to affect the electron beam emission as well.

The electron gun evaporation source is a precision machined body, when work must ensure that cooling water is good, such as high temperature will affect the performance of forming electron beam and the seal ring.

（一）The electron gun head

The gun head gun mounting directly affects the normal work, the fault of the occurred in 90% with the electronic gun head on.

Electron gun head is used for a period of time, because the components of the pollution and affect the forming and the power of the electron beam, need to disassembly and cleaning.

（二）Crucible maintenance

Evaporation source loading sequence：

1 remove the fall two cooling water connecting pipe. 2 screw out the electron gun head is connected with a high-voltage wire two screws. 3 remove the crucible transmission connecting seat and the coupling. 4 screw down evaporation source four fixed screw. 5 evaporation source handling to a smooth and stable working table. 6 remove falling crucible cover plate four screws, remove the cover clean polished. 7 check the cover above the two sealing ring is in need of replacement. 8 evaporation source reverse inverted crucible portion, mat board is used to live. 9 unscrew the four screws fixed crucible rotation 10 up evaporation source, remove the crucible crucible 11 to inversion, eight screws under the crucible bottom cover, dirt clean inside, near the need to check whether the sealing ring. A screw 12 screwed down aqueduct 13 unscrew the crucible rotation mechanism and a crucible cover plate connecting the four screws 14 dials the crucible rotation shaft rotating shaft oil seal, check whether need to change into something 15 crucible clean install. Install according to the above in order to pour.

（三）The maintenance of the magnetic conductive plate and scanning circle

The magnetic conductive plate and a permanent magnet is not need frequent disassembly and maintenance, such as the need to disassemble, please note that the permanent magnet pole direction, the direction and the magnetic conducting plate. Coil because of the space compact installation, please do not use hard something sharp Qiaodong, otherwise may cause damage.

二、Overhaul and maintenance of optical path

optical path adjustment is a prerequisite: ensure the DC power supply stability, modulated light source, optical fiber, grating monochromator, photoelectric conversion amplifier, optical film thickness gauge and the special cable of the intact and the correct access. Especially the ground the photoelectric conversion amplifier, optical film thickness measuring instrument, must separate to the host contact firmly grounded.

Equipment using a week later (San Ban), because in addition to plating coating material on the surface of the workpiece, but also because there is no directivity and lining board in the studio on the coating material, and the plating is thicker, the layer thickness due to organize, around loose, absorb a large amount of gas caused by vacuum coating equipment pumping more slowly. At this time, deal with the studio and liner plate for cleaning, if not necessary to remove the drop components available sandpaper polished clean, liner can be soaked in aqueous hydrofluoric acid, hydrofluoric acid and water ratio need to look at the length of time of soaking and not to hurt the lining board principle.

Note: the liner must be dry moisture to install, before drying, moisture to dry lining board, sandpaper cleaning work frame and other components, the need to clean up all the dust vacuum chamber, the vacuum cleaner suction clean dust available. Finally, when installing the liners, vacuum chamber and lining boards need to use alcohol wipe clean control.

Due to the use of electron gun and ion source assisted deposition, may cause hard to clean, can be used to clean the sand blast method.

四、Optical coating machine maintenance

（一）Regular replacement of oil diffusion pump Diffusion pump oil used for a period of time, about two months (two), because in the high temperature environment, although higher vacuum diffusion pump will start, but still the residual oxygen and other ingredients and make the diffusion pump oil reaction, diffusion pump oil at high temperatures may also cause cracking, decrease the quality, and extend the pumping time. We think that in prolonged too much, should be replaced.

（二）Vacuum pump The mechanical pump oil, maintain the pump oil in use for two months, oil will change. Because oil can be pumped into the water, impurities and other reasons, and the use of oil viscosity variation, the vacuum decrease, so the need to replace. As for the new equipment, in the use of the first half of the month that should be replaced, because in the run in period, the running in oil containing iron is more, will aggravate the wear.

（三）Sanitary Regular health equipment and its surrounding environment, keep equipment clean inside and outside, the equipment surrounding environment finishing a, a good working environment, to ensure safety.